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Epitaxial growth of thick GaN layers on Si substrates and the physics of carbon impurity

主讲人:杨学林(北京大学) 上传时间:2022/12/26 17:55
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课程详情

In this talk, we will discuss current challenges and summarize our latest progresses in the growth of thick GaN layers on Si substrates and physics of the carbon impurity in GaN. We firstly propose a large lattice-mismatch induced stress control technology to grow crack-free GaN and high mobility AlGaN/GaN as well as InAl(Ga)N/GaN heterostructures on Si substrates. Then, a Ga vacancy engineering is demonstrated for growth of thick GaN layers on Si substrates and fabrication of quasi-vertical GaN devices. Finally, the C doping behaviors in GaN are discussed, including the observation of two localized vibrational modes of CN in GaN and clarifying the formation and dissociation process of C-H complex in GaN.

讲师简介:

杨学林,1981年生,北京大学宽禁带半导体研究中心高级工程师,国家优秀青年科学基金获得者。2004年和2009年分别在吉林大学和北京大学获学士和博士学位,2009年-2012年在日本东京大学从事博士后研究工作。近年来在Si衬底上GaN基材料的MOCVD外延生长、C杂质的掺杂调控、缺陷影响电子器件可靠性的机理研究等方面取得了多项进展。以第一/通讯作者在PRL,AFM,APL等期刊上发表SCI论文30余篇;在本领域国内外学术会议上做邀请报告近20次,申请/授权国家发明专利13件。

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