高纯度的金属溅射靶材适用于多种品牌的离子溅射仪: 包括PELCO®, Cressington, Agar, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron, Quorum, and SPI.这些磁控溅射靶材的直径分为60,57,54,50和19mm。
1、高纯60mm金属靶材:适用于Denton DESK II / DESK III / DESK IV/ DESK V, Edwards 150 B / SCANCOAT, Emitech K500/K550/K650和Emscope SC500离子溅射仪。
货号 | 产品描述 | 单位 |
91217 | 铜靶, 99.99% Cu (?60mm x 0.076mm) | 块 |
91210 | 金靶, 99.99% Au (?60mm x 0.1mm) | 块 |
91212 | 金钯合金靶, 99.99% Au:Pd 60/40 (?60mm x 0.1mm) | 块 |
91216 | 镍靶, 99.98% Ni (?60mm x 0.1mm) | 块 |
91214 | 铂靶, 99.95% Pt (?60mm x 0.1mm) | 块 |
91219 | 钯靶, 99.95% Pd (?60mm x 0.1mm) | 块 |
91229 | 银靶, 99.99% Ag (?60mm x 0.1mm) | 块 |
2、高纯57mm金属靶材:适合于 Agar, Cressington 108/208, Emitech SC7620/SC7610/K575X/K575XD, ISI 5400, JEOL JFC 1200/1300/1400/1600/2300HR, PELCO® Model 3, SC4/SC5/SC6/SC7, Polaron 5000/5400/SC7610/SC7620, Quorum Q150, 和 SPI Module/Super离子溅射仪
货号 | 产品描述 | 单位 |
8074 | 铬靶, 99.95% Cr (?57mm x 3.2mm) (208HR only) | 块 |
91117 | 铜靶, 99.99% Cu (?57mm x 0.1mm) | 块 |
8077 | 铜靶, 99.99% Cu (?57mm x 0.3mm) | 块 |
91110 | 金靶, 99.99% Au (?57mm x 0.1mm) | 块 |
8071 | 金靶, 99.99% Au (?57mm x 0.2mm) | 块 |
91112 | 金钯合金靶, 99.99% Au:Pd 60/40 (?57mm x 0.1mm) | 块 |
91111 | 金钯合金靶, 99.99% Au:Pd 60/40 (?57mm x 0.2mm) | 块 |
91132-B | 铟锡氧化物靶 , 99.99% ITO, In2O3/SnO2 90/10 wt % 背面有1mm 铜片, (?57mm x 3mm 总厚)(208HR only) | 块 |
91120 | 铱靶, 99.95% Ir (?57mm x 0.3mm) (208HR only) | 块 |
91124 | 铁靶, 99.5% Fe (?57mm x 0.12mm) (208HR only) | 块 |
8073 | 钼靶, 99.95% Mo (?57mm x 0.25mm) (208HR only) | 块 |
91116 | 镍靶, 99.98% Ni (?57mm x 0.1mm) (208HR only) | 块 |
8079 | 铌靶, 99.95% Nb (?57mm x 0.25mm) (208HR only) | 块 |
91119 | 钯靶, 99.95% Pd (?57mm x 0.1mm) | 块 |
91114 | 铂靶, 99.95% Pt (?57mm x 0.1mm) | 块 |
8076 | 铂钯合金靶, 99.99% Pt:Pd 80/20 (?57mm x 0.1mm) | 块 |
91115 | 铂钯合金靶, 99.99% Pt:Pd 80/20 (?57mm x 0.2mm) | 块 |
91118 | 银靶, 99.99% Ag (?57mm x 0.1mm) | 块 |
91129 | 银靶, 99.99% Ag (?57mm x 0.3mm) | 块 |
8075 | 钽靶, 99.95% Ta (?57mm x 0.3mm) (208HR only) | 块 |
91123 | 钛靶, 99.6% Ti (?57mm x 0.2mm) (208HR only) | 块 |
8078 | 钨靶, 99.95% W (?57mm x 0.25mm) (208HR only) | 块 |
3、高纯54mm金属靶材,适合于Bal-Tec SCD005/040/050/500, MED10/20 和LEICA EM SCD 005/050/500, MED 020 离子溅射仪。
4、高纯50mm金属靶材,适合于Anatech/Technics Hummer I, II, III, Fullam EffaCoater 和 Fullam EMS-76离子溅射仪。
5、高纯38mm金属靶材,适合于Cressington 308HR离子溅射仪。
6、高纯19mm金属靶材,适合于Gatan Model 681 and 682 PECS 离子束溅射仪
镀非导电SEM样品时,如何选择相应靶材: |
Gold黄金 | 优良的靶材,广泛应用于标准SEM镀膜。对于冷镀膜离子溅射仪(如Cressington 108auto),对于热敏性样品几乎不会产生任何热量. 在高倍SEM下可看到颗粒尺寸. |
Gold/Palladium金钯合金 | 溅射率低于纯黄金. 与Au相比,Au/Pd 的颗粒更小,但由于其有两个峰,所以不是很适合EDS分析,也不是很适合热敏性物质镀膜。 |
Palladium钯 | 成本低,可用于中低放大倍数场合,具有更低的SE信号 |
Platinum铂金 | 具有比Au 或 Au/Pd更小的溅射颗粒。但溅射率更低。如果有氧气,则应力开裂的敏感性。有更高的SE产出。 |
Platinum/Palladium铂钯合金 | 颗粒大小与Pt差不多,但应力开立的敏感性较小。非常适合FESEM,但更适合高分辨率镀膜仪208HR. |
Silver银 | 成本低,可用于中低放大倍数场合,颗粒比Au大. 适合于小型SEMs。与Au或Pt相比,SE产出更低。. 如果样品没有放在真空环境下,则镀膜表面易氧化. 可用于特殊的EDS工作. |
Chromium铬 | 非常细的溅射颗粒,适合于 FESEM. 为避免氧化,需用于208HR一样的高真空镀膜仪。镀膜后的样品只能存放在高真空环境中. 溅射离子直线下落。适合生物样品的BE成像,溅射产率低。 |
Iridium铱 | 非常细的溅射颗粒,适合于 FESEM,需用于208HR一样的高真空镀膜仪,溅射产率低。 |
Tungsten钨 | 可替代Cr.颗粒非常细,但氧化非常快,溅射产率低。 |
Nickel镍 | 可作为特殊的EDS应用, 不适合SE成像.适合BE成像,溅射产率低,镀膜易氧化。 |
Copper铜 | 适用于EDS. 适合中/低放大倍数场合,BE成像. |
Note 1:铝的溅射产率非常低,对于SEM离子溅射不适用,且氧化非常快。 Note 2:碳最适合于EDS应用,但很难溅射。碳的蒸发产率非常好。 |
金靶种类选择
厂家 | 型号 | 60mm | 57mm | 54mm | 50mm | 38mm | 19mm |
AGAR | 手动型离子溅射仪 | | X | | | | |
AGAR | 自动型离子溅射仪 | | X | | | | |
Anatech/Technics | Hummer I | | | | X | | |
Anatech/Technics | Hummer II | | | | X | | |
Anatech/Technics | Hummer III | | | | X | | |
Anatech/Technics | Hummer Jr. | | | | X | | |
Bal-Tec | SCD 005 | | | X | | | |
Bal-Tec | SCD 040 | | | X | | | |
Bal-Tec | SCD 050 | | | X | | | |
Bal-Tec | SCD 500 | | | X | | | |
Bal-Tec | MED 10 | | | X | | | |
Bal-Tec | MED 20 | | | X | | | |
Bio-Rad | SC 5200 | | X | | | | |
Bio-Rad | SC 502 | | X | | | | |
Cressington | 108 manual | | X | | | | |
Cressington | 108 auto | | X | | | | |
Cressington | 108/auto/SE | | X | | | | |
Cressington | 208HR | | X | | | | |
Cressington | 308HR | | | | | X | |
Denton | DESK II | X | | | | | |
Denton | DESK III | X | | | | | |
Denton | DESK IV | X | | | | | |
Denton | DESK V | X | | | | | |
Edwards | 150 B | X | | | | | |
Edwards | Scancoat | X | | | | | |
Emitech | SC7620/SC7610 | | X | | | | |
Emitech | K500X/K550X/K650X | X | | | | | |
Emitech | K575/K575XD/Q150 | | X | | | | |
Emscope/Polaron | SC 502 | | X | | | | |
Fullam | EffaCoater | | | | X | | |
Fullam | EMS-76 | | | | X | | |
Gatan | 681 Ion Beam Coater | | | | | | X |
Gatan | 682 PECS Ion Beam Coater | | | | | | X |
ISI | ISI 5400 | | X | | | | |
JEOL | JFC-1200 | | X | | | | |
JEOL | JFC-1300 | | X | | | | |
JEOL | JFC-1400 | | X | | | | |
JEOL | JFC-1600 | | X | | | | |
JEOL | JFC-2300HR | | X | | | | |
LEICA | EM MED 020 | | | X | | | |
LEICA | EM SCD 005 | | | X | | | |
LEICA | EM SCD 050 | | | X | | | |
LEICA | EM SCD 500 | | | X | | | |
PELCO® | Model 3 | | X | | | | |
PELCO® | SC4 | | X | | | | |
PELCO® | SC5 | | X | | | | |
PELCO® | SC6 | | X | | | | |
PELCO® | SC7 | | X | | | | |
Polaron* | E5000 | | X | | | | |
Polaron* | E5200 | | X | | | | |
Polaron* | E5400 | | X | | | | |
Polaron* | SC7610/SC7620 | | X | | | | |
Quorum | Q150 | | X | | | | |
SPI | SPI-Module™ | | X | | | | |
SPI | SPI Super™ | | X | | | | |