Image | SKU | Description | Packaging |
---|
| 12007920 | DIFFUSION PUMP OIL | ea |
| 12268 | DIFFUSION PUMP OIL. (Replaced with part number 12007920) | ea |
| 45035 | O ring | ea |
| 45043 | O ring | ea |
| 45555 | Inlet, electrical | ea |
| 45705 | O ring, Diffusion pump | ea |
| 45713 | Sensor, Door Latch | ea |
| 45714 | SENSOR,RPG IMBAL. RC-M150 | ea |
| 45721 | Thermistor Assembly | ea |
| 45723 | Damping rubber, (order PM kit S204365A) | ea |
| 45724 | Jet, Diffusion pump
| ea |
| 75005801 | Micro Filter Modification Kit - optional
| ea |
| 84332701 | Fuse
| ea |
| 84332802 | Fuse | ea |
| 84333002 | Fuse | ea |
| 84333401 | Fuse | ea |
| 84335901 | Circuit Breaker, main | ea |
| 84355103 | Battery | ea |
| 84520101 | O ring
| ea |
| 84552801 | Adjuster foot | ea |
| 84675101 | Replacement micro filter cartridge - optional | ea |
| 84692401 | Oil Mist trap | ea |
| 84810801 | Grease, Diffusion pump | ea |
| S102296B | Table Assy | ea |
| S204365A | KIT, PM, MICRO ULTRA M120/150 | ea |
| S204746 | Power Cord, 110 ~ 120 VAC | ea |
| S204916A | Panel Assy | ea |
| S204924 | Transformer | ea |
| S204961A | Drive Unit Assembly | ea |
| S204969B | Control Printed Circuit Board | ea |
| S204970A | Drive Printed Circuit Board Assembly | ea |
| S303579 | Pirani sensor head | ea |
| S304569B | Thermal guard (B) ass'y
| ea |
| S305296B | Sensor, Thermal (Drive Unit) | ea |
| S306499 | Sensor Cover A | ea |
| S306842A | Thermomodule assy, Discov. SE | ea |
| S308707A | Line filter board Assy | ea |
| S309163 | Door Cover | ea |
| S309182 | Rear Cover | ea |
| S309185A | Door Lock Assy | ea |
| S309220B | Front Cover Assy
| ea |
| S309222A | Diffusion pump Assembly | ea |
| S309227A | Heater, Diffusion pump | ea |
| S309232A | LCD Cable Assy | ea |
| S3092352 | Top Mat | ea |
| S309301A | Sensor, Oil level | ea |
| S309302A | Tube Assy | ea |
| S309303 | Front Decal
| ea |
| S4012424 | Vacuum hose | ea |
| S407532-HKK | VACUUM HOSE
| ea |
| S408503 | Sensor Cover B | ea |
| S408791A | Oil, Drive Assembly | ea |
| S410357 | Vacuum Pump Oil, (order PM kit S204365A) | ea |
| S412217A | DC Fan | ea |
| S412218A | DC Fan | ea |
| S412250A | DC Fan Assy | ea |
| S412251A | DC Fan (rear) | ea |
| S412278A | Thermistor Assy | ea |
| S412281A | Touch Panel Cable Assy | ea |
| S412282A | LCD Inverter Cable Assy | ea |