高分辨膜厚监控仪

标准配件
MTM-10 控制箱
BNC Cables / BNC Elbow
振荡器柜真空引管O圈
水晶头电缆

The High Resolution Thickness Monitor AND Thickness Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.5nm on a four digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to the FTM Power Supply via the supplied vacuum feedthrough.

该产品是通过收集头部石英晶体的振荡频率的变化信号来检测溅射膜厚。分辨率 为0.5nm。能够原位量化掌控溅射膜厚，同时可实现镀膜的可重复性。