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As the field-proven standard for a range of applications, Hitachi Metal’s Aera® FC-R7700 series delivers precise flow control, while offering the economic benefits of elastomer seals. For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or high leak integrity of metal seals, the FC-R7700 series is both cost-effective and precise.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with no installation hassles. Certain models feature standard electrical connectors and critical dimensions to easily fit existing systems.
Fast Response
Advances in the FC-R7700 series’ technical design delivery enhanced performance compared to competing mass flow controllers (MFCs). These advances include a highly sensitive, rapid-response, small-diameter sensor. With normally-open and normally closed solenoid designs, the FCR7700 series provides a fast response time. These speed enhancements minimize over-shoot and undershoot, and produce an actual-flow settling time of < 2 sec between set points.
Unsurpassed Reliability
With over 40,000 units delivered in FC77X FCR77X series MFCs, < 0.5% are returned within a year of shipment.
本公司可提供各种质量流量控制器（MFC），如Unit, Aera,Tylan,Brooks,Mks,Horiba的校准，维修，再生，二手品回收，新品销售，涉足半导体、光伏、LED等行业CVD、P工艺气体控制系统改造、设计、维修等业务，自动化应用集成，机器人应用、视觉系统、工业控制软件研发及制造，欢迎来电咨询：Wendy张，，邮箱，，公司网址：。
