TMC 数字精密电子定位系统光学平台
数字精密电子定位系统
peps®II是在TMC的专利peps®(精密电子定位系统)基础上建立的并进行了改善。通过添加一个新的数字控制器使pep®II的使用更简单，提供了更多的功能，并且具有改进的用户界面。peps®II是用于TMC气浮隔振系统的数字式非接触高度控制系统。这种系统通常包含机械高度阀和机械高度传感装置，其应用范围从用于半导体制造设备提高沉降时间和增加产量，到要求噪声性能和稳定的平台的精密实验室环境。
特性和好处
?数字控制，用户友好的LCD接口
?用于Gimbal Piston，CSP和Maxdamp的非接触式电动气浮高度控制隔振系统
?z轴位置重复性:10微米
?通过消除常规机械高度控制系统的杠杆接触点改善隔振性能
?气浮前馈功能使z轴对x - y轴运动的反应达到zui 小化
?可选“VX”功能集成惯性传感器，用于垂直隔离器共振主动阻尼
?比例电子阀。通过使用“开关”或传统电子阀门无脉冲噪声引入
Specifications-
| Physical Dimensions | PEPS® II Controller 1.72" (43.7mm) H x 8.0" (203mm) W x 9.4" (240 mm) D |
| Weights | PEPS® II Controller: approximately 3.0 lb (1.2 kg) |
Environmental
(refer to EN 61010-1: 1993,
EN 61010-1/A2: 1995) | For indoor use only, up to an elevation of 2,000 m (6560 ft.)
Maximum allowable temperature range: 5° C to 35° C
Maximum allowable humidity: 80% up to 31° C, decreasing linearly to 50% relative humidity at 40° C
Tolerance in main supply voltage: 85 VAC - 240 VAC
Over voltage category: 2
Pollution degree (IEC 664): 2
Ventilation requirements: 25 mm clearance on sides, 0 mm top and bottom |
| Power Requirements | Power input voltage range: 90-230 VAC
Input frequency range: 50-60 Hz |
PEPS® II User Interface
(Front Panel) | Power switch
4 menu buttons
LCD display 20 x 2 characters
2 diagnostic sockets (BNC-type)
Three-color status LED
USB port |
PEPS® II Interface
(Rear Panel) | AC power entry with EMI filter
1 air INPUT snap-in port for 1/4" O.D. tubing
1 air OUTPUT (Exhaust) snap-in port for 1/4" O.D. tubing
4 air snap-in ports for 1/4" O.D. tubing (one per isolator)
DB-25 male inputs-outputs and feedforward socket
1 Phoenix 0.2" pitch 6 pins GREEN header (vertical proximity sensors)
1 Phoenix 3.5 mm pitch 6 pins BLACK header(horizontal proximity sensors)
Grounding threaded stud (#10-32 thread)
DB-25 F socket: 1x digital Input, 3x geophone sensorsinterface (“-VX” option)
DB-25 F socket: 1x digital input, 3x current output proximity sensors (optional) |
PEPS® II
Performance
Specifications | Analog inputs (unipolar): 8 x 12 bit (16 bit using over sampling), 0…3.0 V full scale
Analog inputs (feedforward): 5 x 12 bit
(16 bit using over sampling), ±9 V full scale
Analog inputs (unipolar) protection: +5 Volts, -0.5 V clipping
Analog input (feedforward) protection: ±15 Volts clipping
Analog outputs: 4 x 12 bit (16 bit with over sampling), 0…3.0 V full scale
Analog outputs (OPTIONAL): 8 x 16 bit, 0…3.0 V full scale
Analog output protection: indefinite short circuit protection, +5 Volts clipping
Digital input voltage rating: 0…+3.3 V, +5 V tolerant (+5 Volts clipping)
Digital output rating: 0…+3.3 V, 20 mA max.
Digital I/O protection: +5 Volts, -0.5 Volts clipping
External available power: +5 VDC, 2.0 A max; +15 VDC, 1.0 A max. (20 Watt max)
Communication port: USB, appears as RS-232 on PC
Processor: ARM7TDMI / 41.78 MHz
Control loop rate: 100 Hz - 2.0 KHz
Proximity sensors: 3x vertical, (3x horizontal optional) Eddy current, NAMUR 0-20 mA output
Velocity sensors - geophones (“-VX” option): 3x vertical, current output |
Pneumatic
Specifications | Long-term height stability: ±50 microns
Long-term tilt stability: ±50 micro radians
Servo valves: 4 x 2-way variable-orifice proportional servo valves
Valving technique: pure class-A
Maximum input pressure: 120 PSI or 8.3 Bar or 830 KPa
Nominal air consumption: 60 slpm (2 scfm)
Air requirements: clean, dry air, filtered to 20 microns or better
Fail safe: isolators deflate on power failure or power off
Pneumatic fittings: 'one touch' quick fittings for 1/4" O.D. hose |
