仪器种类: 台式/落地式能量色散型X荧光光谱、XRF
仪器简介:
PANalytical's Semyos energy-dispersive XRF wafer analyzer is the latest of our successful process control tools designed specifically for semiconductor and data storage metrology. This versatile instrument determines layer composition and thickness uniformity for a wide range of process films.
Moreover, with its<23um FWHM microspot, it is able to measure in the scribelines or in dedicated metrology areas on production wafers.
The Semos wafer analyzer is an advanced metrology tool that addresses the following industry demands:
* On-product thin film metrology
* In-line process control
* Simultaneous determination of film thinkness and composition
* Ability to characterize single films and multi-layer stacks
* Excellent repeatability and reproducibility (Gauge R&R)
* Minimal COO through excellent uptime, high throughput and minimum consumption of utilities
主要特点:
Semyos: Addressing the needs of the semiconductor and data storage industry.
Microspot XRF analysis on production wafers
Versatile wafer handling
For in-line production XRF analysis
Designed for ease-of-use
保修期: 1年
是否可延长保修期: 是
现场技术咨询: 有
免费培训: 一年内2人次技术培训
免费仪器保养: 根据情况提供免费仪器保养
保内维修承诺: 提供免费更换部件和劳务
报修承诺: 48小时到达现场并提供服务
最多添加5台