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激光干涉仪型号： XL80 -
Hitachi日立CT15RE台式离心机型号： CT15RE -
Hitachi日立超速离心机CP70ME型号： CP70ME -
电热鼓风干燥箱型号： CS101-ABN -
Agilent 8890 气相色谱系统型号： 8890 GC -
全自动桌面溶出度测试系统RTJ3000+DS-3000型号： RT-J3000+DS3000 -
全自动溶出度测试仪RT-3型号： RT-3 -
流通池法溶出度测试仪DF-7型号： DF-7 -
自动桌面溶出度测试系统RT-J2000+DS2000α/DS3000型号： RT-J2000+DS2000α/DS3000 -
日立Primaide PLUS高效液相色谱仪型号： Primaide PLUS
获取电话Period: 300nm pitch nominal, one dimensional array. Calibration certificate will give the actual pitch of the standard.
Surface Structure: Aluminum bumps on Silicon, 4x3mm die: Bump height (about 50nm) and width (about 150nm) not calibrated.
Usability: The calibrated pattern covers the entire chip. There is sufficient usable area to make thousands of measurements without reusing any areas contaminated or altered by previous scans.
AFM: Use in contact, tapping and other modes with image sizes from 500nm to 20nm. Mounted on a 12mm steel AFM disk.
SEM: Auger, FIB: Can be used for a wide range of accelerating voltage (1kV-20kV) and calibrates images from 5kX to 200kX. Can be supplied unmounted or mounted on an SEM stub of your choice. SEM Mount selection A-P.
Certification: Supplied with a non-traceable manufacturer's certificate stating average pitch, based on batch measurements
