MKS MicroVision2 残余气体分析仪

Microvision 2 is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. In addition, the Microvision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have made MKS the world leader in RGA products over the widest range of applications from semiconductor tools or particle accelerators to general industrial applications.

APPLICATIONS:

Microvision 2 is useful in a wide range of situations where knowing the contents of your chamber is critical to the success of your process:

• Semiconductor Manufacturing

• Large Scale Coating Tools

• High Mass Performance

• Ultra-High Vacuum

• Harsh Environments

The Microvision 2 can be used to broaden the range of applications where RGA provides value to advanced process control systems. It is available as the core technology in a variety of generic and customised process gas measurements systems. 

MicroVision 2是MKS RGA技术的最新产品，设计用于满足传统RGA的运用，并具备比前一代质谱更高的数据采集速度。它甚至能在宽动态范围的扫描上，每组数据的采集都是毫秒级的。这个能力不需要牺牲RGA任何的性能。这也是MKS的RGA为什么能在半导体，离子加速器方面一直处于领先地位的原因之一。

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