自动椭圆偏振光谱仪

第一部分中文介绍
English introduction to part II
仪器简介：

    我公司生产世界顶尖级椭偏仪，在国际同类产品中性价比最高。仪器具有高稳定性、长寿命、测量速度快、高准确性、高精度等一系列突出优点，是国内唯一大量出口销售美欧的椭偏产品。采用该仪器已经在美国“应用物理快报(Appl. Phys. Lett.)”等国际一流学术刊物上发表多篇论文，并被写入美国科学出版社出版的专著中。该仪器已在世界著名高校和标准计量局广泛应用。公司具有非常专业的工程师为您共同解决一切使用和应用难题， 协助您发表学术论文数据分析， 是您最值得信赖和使用的椭偏产品。

    SC620型自动椭圆偏振光谱仪是单色仪分光、连续波长自动椭圆偏振光谱仪，它具有很宽的可变入射角度选择范围，很高的探测灵敏度，产品波长可根据用户需要从紫外到近红外范围进行各种选择，产品采用辅助光源进行样品准直，操作简便易行，可大大节省操作人员的样品测试前准备时间。SC620是高性能的科研院所及企业研究复杂的多层膜材料用仪器。

技术参数：

1．光 源：氙灯
2．波长范围：350-850 nm；250-1100 nm；250-1700 nm
3．波长精度：1 nm
4．光斑直径： 1-3 mm
5．入射角范围：20度to 90度，5度/步
6．样品台尺寸：Ø160 mm (可进行高低和俯仰调节)
7. 椭偏参数测量范围：Psi(0-90度）；Delta(0-360度）
8．椭偏参数准确性：tg(Psi)≤0.003 ；cos( Delta) ≤0.00001
9．集成化专用测量和分析软件

主要特点：

 连续波长的光源为用户提供了更大地应用空间
   具有补偿器技术，实现0-360度全角度范围的准确测量，无测量盲点
 更简便快捷的样品准直方法
 软件具备丰富的材料数据库
 允许用户自定义色散模型，更方便用户研究新材料的光学性质
 全波长多角度同时数据拟合, EMA模型用于多成分化合物和表面粗糙度分析
 具有实验数据和模拟数据三维绘图功能

part II
English introduction
SC620 Automatic Spectroscopic Ellipsometer
 
Instrument Introduction:
We produce the world's top-class ellipsometer, with the highest quality to price ratio in the international similar products. Our instruments have a series of prominent advantages of high stability, long lifetime, fast measurement speed, high accuracy and high precision. It is the unique ellipsometer product to have been exported to the United States and Europe with a large number of sales. The measurement data of the instrument has been published in world-class academic journals and written into monographs published by the American Science Press. The instrument has been widely used in the world-renowned universities and the Bureau of Standards and Metrology. The company has very professional engineers to solve all the use and application problems for you, to help you analyze academic data. Our ellipsometer is your most trusted ellipsometric product.
 
SC620 is an automatic monochromatic continuous wavelength spectroscopic ellipsometer, which has a wide variable incident angle range, high detection sensitivity. The wavelength is covered from ultraviolet (UV) to the near infrared (NIR) range according to user needs. The instrument uses a unique high stability phase shifter to greatly improve the sensitivity of the measurement, which eliminates the blind spot of ellipsometric angle measurement for the entire wavelength range. The product uses an auxiliary light source as sample collimator, which makes the operation be simple, and can greatly save preparation time before the sample testing. SC620 is a high-performance instrument to investigate multi-layer film materials for institutes and corporates.
 
Technical parameters:
1. Light source: xenon lamp
2. Wavelength range: 350-850 nm; 250-1100 nm; 250-1700 nm
3. Wavelength accuracy: 1 nm
4. Spot diameter: 1-3 mm
5. Angle of incidence: 20 degrees to 90 degrees, 5 degrees / step
6. Size of sample stage: Ø160 mm (height and title adjustment)
7. Range of ellipsometric parameters: Psi (0-90 degrees); Delta (0-360 degrees)
8. Accuracy of ellipsometric parameters: tan (Psi) ≤ 0.003; cos (Delta) ≤ 0.00001
9. Integrated dedicated measurement and analysis software
 
Main features:
Continuous wavelength light source to provide users with great application of space
l  Compensator technology to achieve accurate measurement range of 0-360 degrees full angle measurement without blind spot
l  Simple and efficient sample collimator
l  A wealth of material database
l  Allows the user to define dispersion model to study the optical properties of new materials
l  Perspective of full wavelength multiple data fitting simultaneously, EMA model for multi-component compounds and surface roughness analysis
l  3D drawing capabilities with experimental data and simulation data