可变形反射镜 Boston Micromachines

The Multi-DM: A versatile, robust deformable mirror system for advanced wavefront control
The popular and versatile Multi-DM offers sophisticated aberration compensation in an easy-to-use
package. With 140 precisely controlled elements and low inter-actuator coupling, this system is
ideal for a broad range of applications including as microscopy,
retinal imaging, and laser beam shaping. The high speed, high
precision driver electronics are easily controlled via USB
interface. The DM is available in both continuous and
segmented surfaces for adaptive optics or spatial light modulator
applications. The DMs are capable of up to 5.5 μm stroke, 20 kHz
frame rate*, have sub-nm step size, and zero hysteresis.
* 1.5 μm DM and SLM capable of 20 kHz.

Stroke 1.5 μm 3.5 μm 5.5 μm
Aperture 3.3 mm 4.4 mm 4.95 mm
Pitch 300 μm 400 μm 450 μm
Approx. Mechanical <20 μs <100 μs <500 μs
Response Time
(10%-90%)
Approx. Interactuator 25% 35% 40%
Coupling (+/- 5%)
SLM Coupling 0%
DM Selection Chart
Boston

High Order Aberration Correction
DM Specifications
- 140 actuators (12x12 array without 4 corners)
- Coating: Aluminum or Gold
- Protective Window with 400-1100nm or 1550nm
AR Coating
- Zero hysteresis
- Sub-nm average step size
- Fill Factor >99% (DM), 98% (SLM)
- Surface Finish: <20nm RMS
Driver Specifications
- USB 2.0 Interface
- 100-240V AC Input
- 14 bit step resolution
- Frame Rate: 8 kHz with 34 kHz burst
- Dimensions: 9" x 7" x 2.5"