基质辅助脉冲激光沉积系统（MAPLE,专业用于高分子镀膜工艺）

仪器简介：
中科院宁波材料所于2014年1月向我司订购一台MAPLE系统，该系统为国内首台“基质辅助脉冲激光沉积系统”！

MAPLE处理过程
In the MAPLE process, a polymer/solvent mix is frozen inside the deposition chamber with liquid nitrogen. The frozen mixture then acts as the target for an incident pulsed laser beam. Using a pulsed laser, a small section of the frozen target will evaporate in a very short period of time, throwing the mixture into the vapor phase.The polymer material will then deposit on the substrate while the solvent will be pumped away (if you choose the correct solvent). This process has been used to successfully deposit a wide variety of polymer materials.   

激光器
The original MAPLE work utilized an excimer laser but IR lasers provide much better polymer thin film quality. The reason is the energy per photon for excimer lasers operates at 248-nm (KrF) in above 5 eV. This is enough energy to break polymer chains and reduce the functionality of the deposited polymer materials. MAPLE systems utilize an Er:YAG laser that operates at 2.9 microns where each photon has only about 0.3 eV of energy. Thus, polymer functionality remains intact since the polymer chains are not fractured by the low energy photons.

样品注入
MAPLE system utilizes a unique injection process that allows you to freeze your polymer/solvent mix in-situ after you have purged the chamber of water vapor. Our MAPLE system utilizes a quick target cool-down and quick target heat up assembly to maximize throughput. Our rotating target assembly makes excellent thermal contact with the cooling block.  
 
腔体设计
MAPLE system is built with large hinged front door for easy access to the internal components. This provides for easy sample transfers through the front door. The systems come complete with a fully enclosed optical train and laser beam rastering, turbo pumping package, and lap top computer control utilizing Lab View software. Valve packages can be manual or all electropneumatic as required. A wide variety of standard options are also available.

系统技术指标：
最大衬底尺寸
One 2-inch diameter substrate or multiple small samples. Larger substrates and custom substrate holders are available on request.
最大衬底温度：300°C typical, but other heaters are available.
MAPLE靶材温度： -194°C (80 K)
压力操作范围：Base pressure depends strongly on polymer/solvent mix and the solvent vapor pressure
MAPLE靶材尺寸：Single 1.5” diameter target standard, larger targets available on request.
靶材到衬底(Throw) 距离：Variable from 2.5 to 4 inches
光栅路径长度：Across complete MAPLE target
标准的激光束射向靶材入射角度：60°
主腔体本底真空：P < 5 x 10^-7 Torr guaranteed with system at room temperature and no polymer/solvent mix.
真空腔体：Box style chamber with easy substrate / target changes.
激光波长：2.9 microns (Er:YAG laser), other lasers/wavelengths available on request.

VIS/NIR Resonant PLD/MAPLE System
可见/近红外共振PLD/MAPLE系统
 

VIS/NIR Resonant PLD/MAPLE 处理过程
This process uses a frequency doubled Nd:YAG laser to pump an OPO. The output of the OPO ranges from about 680 - 2,400 nm with pulse lengths of a few ns. The energy per pulse varies strongly on wavelength ranging from about 120 mJ in the VIS and drops to about 15 mj in the IR. By tuning the wavelength of the laser the customer may be able to couple to vibrational bands of specific materials to provide very strong coupling to the target material. This can yield high deposition rates with little target damage, especially for polymer materials. This process can also be used with MAPLEtargets as well