核心参数
仪器种类: 台式/落地式能量色散型X荧光光谱、XRF
行业专用类型: 其他
产地类别: 进口
元素分析范围: -
分析含量范围: -
能量分辨率: -
重复性: -
仪器简介:
PANalytical's Semyos energy-dispersive XRF wafer analyzer is the latest of our successful process control tools designed specifically for semiconductor and data storage metrology. This versatile instrument determines layer composition and thickness uniformity for a wide range of process films.
Moreover, with its<23um FWHM microspot, it is able to measure in the scribelines or in dedicated metrology areas on production wafers.
The Semos wafer analyzer is an advanced metrology tool that addresses the following industry demands:
* On-product thin film metrology
* In-line process control
* Simultaneous determination of film thinkness and composition
* Ability to characterize single films and multi-layer stacks
* Excellent repeatability and reproducibility (Gauge R&R)
* Minimal COO through excellent uptime, high throughput and minimum consumption of utilities
主要特点:
Semyos: Addressing the needs of the semiconductor and data storage industry.
Microspot XRF analysis on production wafers
Versatile wafer handling
For in-line production XRF analysis
Designed for ease-of-use
企业名称
上海思百吉仪器系统有限公司
企业信息已认证
企业类型
信用代码
310000400417821
成立日期
2005-03-22
注册资本
200
经营范围
马尔文帕纳科
公司地址
上海徐汇区田州路99号新安大楼13号楼101室
客服电话