TMC 主动隔振基座光学平台

Active degrees of freedom

6

Active bandwidth

0.6 Hz - 100 Hz

Passive natural frequency

12 Hz nominal

Effective active resonant frequency

0.5 Hz

Isolation at 1 Hz

40% - 70%

Isolation at 2 Hz

90%

Isolation at ≥3 Hz

90-98%

Internal noise

<0.1 nm RMS

Operating load range

Standard capacity: 900 - 2,500 lbs (408 - 1134 kg)
High capacity: 2,500 - 3,200 lbs (1134 - 1452 kg)

Static lift capacity

12,000 lbs (5454 kg)

Magnetic field emitted
at maximum 4 in.(102 mm)
from the platform

<0.02 μG broadband RMS

Environmental and safety

CE and RoHS compliant

Active isolation elements

high-force piezoelectric actuators that receive signal
from a high-voltage amplifier with an output of up to 800 VDC

Passive isolation element

single stiff elastomer (no compressed air supply required)

Vibration sensor elements

downward facing geophone type inertial sensors
that measure floor vibration below the isolator
and deliver voltage proportional to the velocity of vibration motion

Active feedback control loop

Floor vibration is measured, processed
and attenuated below the spring
supporting the isolated surface

Dimensions (WxD)

35.25 x 44.25 in.
895 x 1124 mm

Height

6.3 in. (160 mm) nominal,
doesn't change when SEM-Base is switched off

Operating temperature

50° - 90° F
10° - 32° C

Storage temperature

-40° - 130° F
-40° - 55° C

Humidity (operating)

30 - 60%

System power requirements

100, 120, 230, 240 VAC
50/60 Hz AC; <600 W
CE compliant

Floor displacement

<800 μin. (20 μm) below 10 Hz

Processor

150/75 MHz dual core

Sampling rate

10 kHz

Analog outputs

16 channels

Analog inputs

16 channels

Status light

single LED

Front panel ports

1x serial USB 2.0
1x serial Micro-USB
1x Ethernet RJ-45
2x BNC

User interface

Front panel LCD display
Character menu on HyperTerminal
Extended GUI for Microsoft Windows
Embedded Ethernet GUI