简介:A direct determination of the Young’s modulus and the Poisson’s ratio in a 140 nm polycrystalline
tungsten thin film deposited by ion-beam sputtering on a polyimide substrate has been performed by
coupling x-ray diffra简介:A direct determination of the Young’s modulus and the Poisson’s ratio in a 140 nm polycrystalline
tungsten thin film deposited by ion-beam sputtering on a polyimide substrate has been performed by
coupling x-ray diffraction measurements with in situ tensile testing. The method described in this
article to extract the Young’s modulus of thin films from the evolution of the sin2c curves as a
function of applied load only requires to know the substrate Young’s modulus. The determination of
the thin film Poisson’s ratio can be realized without knowing any of the substrate elastic constants.
In the case of the tungsten thin film, the obtained Young’s modulus was close to the bulk material
one whereas the Poisson’s ratio was significantly larger than the bulk one.详细>