简介:An expandable system has been developed to operate multiple probes for the atomic force
microscope in parallel at high speeds. The combined improvements from parallelism and enhanced
tip speed in this system represent 简介:An expandable system has been developed to operate multiple probes for the atomic force
microscope in parallel at high speeds. The combined improvements from parallelism and enhanced
tip speed in this system represent an increase in throughput by over two orders of magnitude. A
modular cantilever design has been replicated to produce an array of 50 cantilevers with a 200 mm
pitch. This design contains a dedicated integrated sensor and integrated actuator where the cells can
be repeated indefinitely. Electrical shielding within the array virtually eliminates coupling between
the actuators and sensors. The reduced coupling simplifies the control electronics, facilitating the
design of a computer system to automate the parallel high-speed arrays. This automated system has
been applied to four cantilevers within the array of 50 cantilevers, with a 20 kHz bandwidth and a
noise level of less than 50 Å. For typical samples, this bandwidth allows us to scan the probes at
4 mm/s详细>