中文名称:洁净室和相关控制环境.第2部分:证明持续符合IEST/ISO 14644-1-1999标准要求的试验和监测规范
英文名称:Cleanrooms and associated controlled environments--Part 2: Specifications for testing and monitoring to prove continued compliance with IEST/ISO 14644-1:1999
ICS分类:13.040.35
中标分类:N64
发布日期:2003-07-29
实施日期:
替代标准:
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