【序号】:1
【作者】:Marc J. Madou【题名】:
Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition【期刊】:
by CRC Press【年、卷、期、起止页码】:
March 13, 2002【全文链接】:https://www.crcpress.com/Fundamentals-of-Microfabrication-The-Science-of-Miniaturization-Second/Madou/p/book/9780849308260