【序号】：1
【作者】：Grill, A.
【题名】：Cold Plasma Materials Fabrication:From Fundamentals to Applications
【期刊】：Wiley-IEEE Press
【年】： 1994
【全文链接】：http://ieeeexplore.com/xpl/bkabstractplus.jsp?bkn=5271223

Frontmatter
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1. Fundamentals of Plasma
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2. Cold Plasma Generation
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3. Plasma Chemistry
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4. Plasma Reactors
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5. Plasma Diagnostics
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6. Cold Plasma Processes for Surface Modification
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7. Deposition of Coatings by PECVD
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8. Plasma Assisted Etching
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Index
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About the Author
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