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共有 1 人回复了该问答SEM中的面扫描与XPS中的成像XPS
 回复hankouminjing发表于:2020/7/27 15:17:16悬赏金额:18积分 状态:未解决
在SEM中作扫描时是否存在几何因素,也就是说电子束斑的入射角度与出射角度以及束斑的大小等这些因素影响面扫的成像,出现不能很真实反映样品的元素分布情况?

成像XPS是否也类似?
 回复  1# v2721826  回复于:2020-07-28 23:27:16
For SEM, the geometery is "less" affected because usually the SEM detector is put very close to the sample so unless the sample geometry is huge otherwise it should be relatively less affected by geometry in a way not able to see some elements on the samples.

For XPS, usually analyzer is SCA. And it needs to travel through it to make the detection of electrons hence making the spectra > then next making the XPS map. Due to this, geometry of sample could be critical as easily it can result in what so-called as "shadowing" effect.
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