回复hanc1202发表于:2020/9/24 23:50:13悬赏金额:
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【序号】:1
【作者】:Kang-Yul Bae Young-Soo Yang Bum-Ho Choi
【题名】:Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system
【期刊】: Journal of Engineering Manufacture
【年、卷、期、起止页码】:June 2013 vol. 227 no. 6 881-889
【全文链接】:http://pib.sagepub.com/content/227/6/881.refs