【序号】:1
【作者】:
MATSUYAMA TOMOYUKI (Nikon Kaihatsuhombu)
【题名】:The newest lithography-focusing on immersion lithography. Polalized-light illumination and ultra-high NA imaging
【期刊】:J-EAST
【年、卷、期、起止页码】:
VOL.;
NO.308;
PAGE.768-772(2005)
【链接】:
http://sciencelinks.jp/j-east/article/200517/000020051705A0604126.php