【序号】:1
【作者】:Jau Hwang Ho, Chung Len Lee, Tan Fu Lei
【题名】:Error reduction in the ellipsometric measurement on thin films
【期刊】:
Solid-State Electronics【年、卷、期、起止页码】: August 1988,
Volume 31, Issue 8, Pages 1321–1326
【链接】:
http://www.sciencedirect.com/science/article/pii/0038110188904327【序号】:2
【作者】:
Park, Sunglim;
Jung, Jaewha;
Seo, Jeongwoo;
Kang, Dongkyun;
Gweon, Daegab【题名】:Auto-alignment for incident angle of ellipsometer
【期刊】:Proc. SPIE
【年、卷、期、起止页码】:2001,Volume 4564 (1)
SPIE – Oct 4
【链接】:
http://www.deepdyve.com/lp/spie/auto-alignment-for-incident-angle-of-ellipsometer-VzAtzueV0N/1