【序号】：1
【作者】：Wonyoung Lee and Fritz B. Prinz
【题名】：Area-Selective Atomic Layer Deposition Using Self-Assembled Monolayer and Scanning Probe Lithography【期刊】：J. Electrochem. Soc.,
【年、卷、期、起止页码】：Volume 156, Issue 9, pp. G125-G128 (2009)【全文链接】 http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JESOAN00015600000900G125000001&idtype=cvips&gifs=yes&ref=no 【序号】：2
【作者】：Riikka L. Puurunen【题名】：Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process【期刊】：J. Appl. Phys
【年、卷、期、起止页码】：97, 121301 (2005);【全文链接】http://jap.aip.org/resource/1/japiau/v97/i12/p121301_s1?isAuthorized=no 
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