回复hanc1202发表于:2020/8/15 11:53:42悬赏金额:
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【序號】:1
【作者】:C. H. Shon, J. K. Lee.
【篇名】:Modeling of magnetron sputtering plasmas
【期刊】: Applied Surface Science Volume 192, Issues 1-4, 30 May 2002, Pages 258-269
【全文連接】:http://www.sciencedirect.com/science/article/pii/S0169433202000302
【序號】:2
【作者】:U.H. Kwon, S.H. Choi, Y.H. Park and W.J. Lee
【篇名】:Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system
【期刊】: Thin Solid Films,Volume 475, Issues 1-2, 22 March 2005, Pages 17-23
【全文連接】:http://www.mendeley.com/research/multiscale-simulation-plasma-generation-film-deposition-circular-type-dc-magnetron-sputtering-system/
【序號】:3
【作者】:Zhou, Chuandong; Stoltz, Peter H.;
【篇名】:Numerical simulation of a magnetron plasma sputtering system using VORPAL
【期刊】: Plasma Science, 2010 Abstracts IEEE International Conference on Issue Date: 20-24 June 2010
【全文連接】:http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5534033
【序號】:4
【作者】:H. Kupfer and F. Richter
【篇名】:Investigation of plasma characteristics in an unbalanced magnetron sputtering system
【期刊】: PLASMA PHYSICS REPORTSVolume 35, Number 5, 399-408,
【全文連接】:http://www.springerlink.com/content/23u17364185551q0/
【序號】:5
【作者】:Y. Kusumoto , , K. Iwata,
【篇名】:Numerical study of the characteristics of erosion in magnetron sputtering
【期刊】: Vacuum Volume 74, Issues 3-4, 7 June 2004, Pages 359-365
【全文連接】:http://www.sciencedirect.com/science/article/pii/S0042207X0400051X