【序號】：1

【作者】：F. Jimenez, S. D. Ekpe, and S. K. Dew

【篇名】：Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system

【期刊】：Journal of Vacuum Science & Technology A / Volume 24 / Issue 4   

【全文連接】：http://avspublications.org/jvsta/resource/1/jvtad6/v24/i4/p1530_s1?isAuthorized=no

【序號】：2

【作者】：Claudiu Costin, Tiberiu M. Minea, Gheorghe Popa, Gerard Gousset

【篇名】：Fluid Modelling of DC Magnetrons—Low Pressure Extension and Experimental Validation

【期刊】：Plasma Processes and Polymers Volume 4, Issue Supplement 1, pages S960–S964, April 2007 

【全文連接】：http://onlinelibrary.wiley.com/doi/10.1002/ppap.200732307/abstract