【1】
【作者】：M. Schvartzman, K. Nguyen, M. Palma, J. Abramson, J. Sable, J. Hone, M. P. Sheetz, and S. J. Wind
【题名】：Fabrication of nanoscale bioarrays for the study of cytoskeletal protein binding interactions using nanoimprint lithography 
【期刊】： J. Vac. Sci. Technol. B
【年、卷、期】： Volume 27, Issue 1, pp. 61-65 (January 2009)
【全文链接】： http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000027000001000061000001&idtype=cvips&gifs=Yes

【2】
【作者】： R. Ramos, G. Cunge, O. Joubert, and T. Lill
【题名】： Plasma reactor dry cleaning strategy after TaC, MoN, WSi, W, and WN etching processes
【期刊】： J. Vac. Sci. Technol. B
【年、卷、期】： Volume 27, Issue 1, pp. 113-121 (January 2009)
【全文链接】：http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1

【3】
【作者】： Raghunath Murali
【题名】： Mitigation of microloading effect in nanoimprint mask fabrication
【期刊】： J. Vac. Sci. Technol. B
【年、卷、期】： Volume 27, Issue 1, pp. 167-168 (January 2009)
【全文链接】：http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1


【4】
【作者】： Hyo-Sung Lee, Jung-Sub Wi, Sung-Wook Nam, Hyun-Mi Kim, and Ki-Bum Kim
【题名】：Two-step resist-development process of hydrogen silsesquioxane for high-density electron-beam nanopatterning
【期刊】： J. Vac. Sci. Technol. B
【年、卷、期】： Volume 27, Issue 1, pp. 188-192 (January 2009)
【全文链接】：http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1

【5】
【作者】： Jing Wan, Zhen Shu, Shao-Ren Deng, Shen-Qi Xie, Bing-Rui Lu, Ran Liu, Yifang Chen, and Xin-Ping Qu
【题名】：Duplication of nanoimprint templates by a novel SU-8/SiO2/PMMA trilayer technique
【期刊】： J. Vac. Sci. Technol. B
【年、卷、期】： Volume 27, Issue 1, pp. 19-22 (January 2009)
【全文链接】：http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9&Volume=27&Issue=1
谢谢版主结贴！